Characteristic Performance of Radio-Frequency (RF) Plasma Heating Using Inverter RF Power Supplies
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چکیده
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ژورنال
عنوان ژورنال: IEEJ Transactions on Fundamentals and Materials
سال: 2000
ISSN: 0385-4205,1347-5533
DOI: 10.1541/ieejfms1990.120.7_768